Numerical Simulation Of Aln-based Triangular Flexural Accelerometer

Abstract

Flexible, Miniaturized, And Lead-free Piezoelectric MEMS Accelerometers Are Increasingly Required In Aerospace, Mechatronics, And Structural Health Monitoring Applications. In This Work, A Flexural-type MEMS Piezoelectric Accelerometer Is Designed And Numerically Investigated Using Aluminium Nitride (AlN) As The Piezoelectric Sensing Material. The Proposed Accelerometer Consists Of A Triangular Seismic Mass Supported By Three Symmetrically Arranged Suspension Beams To Enhance Strain Concentration At The Beam Junctions While Maintaining Structural Stiffness. Numerical Simulations Carried Out Via COMSOL Multiphysics Implement Coupled Solid Mechanics And Piezoelectric Physics. Modal Analysis Revealed A High Fundamental Resonant Frequency Of Approximately 26.5 KHz. Static Analysis Conducted Under A 1\text{ G} Acceleration Load Demonstrated That Von Mises Stress And Displacement Remain Safely Within Elastic Limits. Electro-mechanical Analysis Confirms Effective Strain-induced Voltage Generation In The AlN Layer, Yielding An Estimated Sensitivity Of Approximately 0.33 MV/g With Stable Linearity Up To 15,000 G. A Comparative Study Highlights That This Lead-free Design Offers A Significantly Higher Resonant Frequency And Acceleration Handling Capability Than Traditional Configurations.

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