MEMS GAS SENSOR AND THEIR NEW APPLICATIONS – A REVIEW

• Author(s):

  N.Nandakumar | R.Thangavel | K.Shanmugasundaram | P.P.Sumi

• Keywords:

  MEMS, Gas Sensors, Sensors Applications, IR Gas Sensors

• Abstract:

  The Aim Of This Paper Is To Give An Introduction To Micro-electromechanical Systems (MEMS) Sensors And To Consider A Number Of Recent Applications And Commercialization, Markets And Product Developments. Design/methodology/ Approach – Following The First

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Other Details

• Paper id:

  IJSARTV3I817253

• Published in:

  Volume: 3 Issue: 8 August 2017

• Publication Date:

  2017-08-14

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